Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure

Abstract

The MEMS structures represent a milestone in the actual bioengineering and micro-fluidics area. Si-mulators are necessary for the students training or for specialists at the design stage. This paper presents some tools and their applications for the simulation of an integrated micropump, achievable in the SOI technology. The simulations results intend to emphasize the tools performances and functions with example on the proposed SOI-MEMS structure. Furthermore, the paper is focused on the software facilities and possible lab them as a contribution to the learning technologies.