Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure

Authors

  • Cristian R Ravariu Politehnica University of Bucharest, Faculty of Electronics Telecommunications and Information Technology
  • Florin Babarada Politehnica University of Bucharest, Faculty of Electronics

DOI:

https://doi.org/10.3991/ijoe.v7i2.1543

Keywords:

devices, membrane, simulator

Abstract


The MEMS structures represent a milestone in the actual bioengineering and micro-fluidics area. Si-mulators are necessary for the students training or for specialists at the design stage. This paper presents some tools and their applications for the simulation of an integrated micropump, achievable in the SOI technology. The simulations results intend to emphasize the tools performances and functions with example on the proposed SOI-MEMS structure. Furthermore, the paper is focused on the software facilities and possible lab them as a contribution to the learning technologies.

Author Biographies

Cristian R Ravariu, Politehnica University of Bucharest, Faculty of Electronics Telecommunications and Information Technology

Microelectronics Department

Florin Babarada, Politehnica University of Bucharest, Faculty of Electronics

Microelectronics Department

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Published

2011-05-07

How to Cite

Ravariu, C. R., & Babarada, F. (2011). Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure. International Journal of Online and Biomedical Engineering (iJOE), 7(2), pp. 36–39. https://doi.org/10.3991/ijoe.v7i2.1543

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Section

Papers