Ravariu, C. R., & Babarada, F. (2011). Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure. International Journal of Online and Biomedical Engineering (iJOE), 7(2), pp. 36–39. https://doi.org/10.3991/ijoe.v7i2.1543