RAVARIU, Cristian R; BABARADA, Florin. Simulation Tools Used in Micro-Electro-Mechanical Systems. A Case Study on a Non-Conventional SOI-MEMS Structure. International Journal of Online and Biomedical Engineering (iJOE), [S. l.], v. 7, n. 2, p. pp. 36–39, 2011. DOI: 10.3991/ijoe.v7i2.1543. Disponível em: https://online-journals.org/index.php/i-joe/article/view/1543. Acesso em: 30 jun. 2024.